Product Overview

The femtosecond laser standard platform independently developed by our team is an industrial-grade processing device integrating high performance with ultra-high precision. Based on femtosecond laser pulse technology, it enables micron-scale structure fabrication on or inside material surfaces, featuring ultra-high peak power and ultra-short pulse duration. It is widely applicable to various precision material micromachining scenarios.

The device is equipped with an aerostatic precision motion platform. Leveraging the aerostatic and hydrodynamic effects of gas, it achieves friction-free and vibration-free smooth motion with excellent guidance precision. The guide rail adopts a gas non-contact lubrication method with an extremely low friction coefficient, effectively reducing drive power consumption, minimizing wear, and extending service life.

Thanks to the unique error averaging effect of aerostatic rails, the platform can achieve higher levels of motion guidance precision under reasonable manufacturing precision conditions, balancing performance and cost advantages. Meanwhile, the air film thickness is almost unaffected by operating speed, eliminating crawling at low speeds, ensuring smooth motion throughout, and delivering outstanding repeated positioning precision.

Product Parameters

Parameter Category Indicator Remarks
Performance Indicators Equipment Positioning Accuracy ±0.2µm
Linear Motion Error 0.05µm / 100mm
Motion Range (X/Y/Z) 300×300×30mm
TGV Via Diameter 10µm
Via Pitch <0.5µm
Structure Aspect Ratio Aspect ratio
Processable Materials Quartz, glass, ceramics, semiconductors, insulators, polymers, resins, metals, etc.

Product Advantages

01
High Precision

Based on aerostatic and hydrodynamic effects, it achieves friction-free and vibration-free smooth motion, effectively enhancing ultra-precision motion control capability in TGV processing with extremely high guidance precision.

02
Non-contact

Gas lubrication on the rail surface with an extremely low friction coefficient greatly reduces the drive power of the working device. The rail also has minimal wear and a long service life.

03
Low Error

The error averaging effect of aerostatic rails enables higher guidance precision with lower manufacturing precision requirements.

04
Smooth Motion

The air film thickness is almost unaffected by speed, eliminating crawling even at extremely low speeds, ensuring smooth motion and high repeated positioning precision.

05
High Resolution

The beam can be shaped into a Bessel beam, effectively improving micromachining resolution.

06
Visual Operation

The host computer software features real-time coordinates and speed display for X, Y, Z axes, as well as real-time machining trajectory display.

Application Scenarios

This product is mainly applied in the medical field, industrial precision processing, scientific research experiments, and laser drilling microscope scanning scenarios, providing reliable solutions for high-precision micromachining.

Medical Field

Medical Field

Used for medical device manufacturing, biochip processing, precision drilling of medical devices, etc., enabling micromachining of high-precision medical components.

Industrial Precision Processing

Industrial Precision Processing

In semiconductors, microelectronics, optical devices and other fields, performing micron-scale micro-hole processing, precision cutting, and surface modification treatment.

Scientific Research

Scientific Research

Providing high-precision micromachining platforms for research institutions, supporting experimental needs in cutting-edge fields such as materials science, optical research, and nanotechnology.

Laser Drilling

Laser Drilling

Enabling micro-hole, small-hole, and fine-hole processing for various materials, suitable for spinnerets, filter materials, precision molds, and other industries.