Product Overview
The flexible maglev intelligent transport system is a high-end intelligent transport platform independently developed by Feimi. Using maglev drive and high-precision non-contact positioning technology, the system enables precise 6-DOF positioning and high-speed stable movement of precision materials such as wafers within a two-dimensional plane, with no contact, no friction and no cable constraints throughout operation. The modular design allows free expansion and flexible combination like assembling puzzles, and supports independent parallel operation and intelligent collaborative scheduling of multiple carriers. The solution completely eliminates traditional mechanical contact transmission structures, eradicating particle contamination and vibration sources generated during operation from the source, while breaking through pipeline layout limitations and significantly improving production line layout flexibility.
The product has diverse application scenarios: for semiconductor, photovoltaic and biomedical equipment manufacturers, it can serve as the internal core transmission module of their high-end process equipment; meanwhile, for advanced manufacturing factories pursuing intelligent production line upgrades, this product can provide a complete solution for flexible production line logistics. With core features such as high flexibility, high precision and high agility, it perfectly adapts to the demanding working conditions of high-end precision manufacturing, significantly enhancing the flexibility and intelligence level of production lines, and driving the manufacturing industry toward greater efficiency, precision and intelligence.
Independent Mover Motion / Micron-level Positioning / Zero Wear / Precise DOF Motion / Flexible Expansion
Product Parameters
Product Advantages
Flexible Production Adaptation
Enables batch transportation of different products, helping enterprises synchronize production of products with different specifications.
Modular Design
Mover modules can be spliced together to flexibly respond to different production scenarios and product needs.
High Precision Positioning
The system has high positioning precision, allowing independent geometric shape determination for each product path, achieving precise positioning during processing.
Non-contact Maintenance-free
The entire system is contact-free, frictionless, and cable-free, significantly reducing operational and maintenance costs.
Application Scenarios
Biomedical
In scenarios such as aseptic filling and cell therapy, transmits pharmaceuticals, culture dishes, etc., absolutely avoiding contamination risks.
Semiconductor Processing
Used in vacuum loading chambers of PECVD, etching and other equipment, enabling contamination-free, high-precision and rapid transfer of wafers between chambers, directly replacing partial functions of traditional robotic arms.
New Energy Photovoltaic
In the assembly and testing of semiconductors, photovoltaic cells and displays, connects different stations to achieve flexible routing and precise docking of material boxes (FOUPs) or individual workpieces.
Industrial Manufacturing
In production lines for 3C electronics, automotive components, food packaging, etc., replaces traditional belt/chain conveyors, achieving independent control, high-speed sorting and flexible grouping of materials between stations, significantly improving production line changeover efficiency and scheduling flexibility.